patent/US-6682402-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6682402-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dfcd1a217ba95dc487e1e6ee172da349
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B41-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-26
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B41-047
filingDate	2000-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2004-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1000d88b99d381964f3dde891ac5ff1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c46793b6a2d6c0d5c8e85c56f3dd50f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cde96b0d869f01da376146fca4b403a1
publicationDate	2004-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6682402-B1
titleOfInvention	Polishing pads and methods relating thereto
abstract	This invention describes improved polishing pads useful in the manufacture of semiconductor devices or the like. The pads of the present invention have an advantageous hydrofoil polishing material and have an innovative surface topography and texture which generally improves predictability and polishing performance.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006046064-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10399201-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8715035-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9278424-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11724362-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685014-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10537974-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10391605-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8939818-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/IT-VR20130167-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009053976-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015183141-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015008210-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10875145-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002193708-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10875153-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7704125-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10384330-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10821573-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11072050-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9873180-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11772229-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006099891-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7169030-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11524384-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10040226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6843712-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11471999-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004048564-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8864859-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007275226-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7445847-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11745302-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9919407-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100540224-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11446788-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I418443-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-100540225-C http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10596763-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10953515-B2
priorityDate	1997-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4927432-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22228769 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129129992 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7956 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128387780 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID114686 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129896137

Total number of triples: 68.