http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6664196-B1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be055db3c1a09879df07379ba969e223
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823828
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8238
filingDate 2000-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91113d6ec818f5b75d11c1875bdd4094
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1ab3e05c3a5531eb0f9e0e4b2610efc6
publicationDate 2003-12-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-6664196-B1
titleOfInvention Method of cleaning electronic device and method of fabricating the same
abstract An electronic device having a component containing a refractory metal such as tungsten is cleaned by using a cleaning solution composed of an acidic solution which does not substantially contain aqueous hydrogen peroxide or an alkaline solution which does not substantially contain aqueous hydrogen peroxide.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7144766-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003228744-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935599-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7196006-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063276-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049187-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006009046-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005224995-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007247904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7531455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005139233-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005215003-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005112904-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010120256-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7300833-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012135594-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6790734-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7026246-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012161138-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349675-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008003792-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010042229-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010042229-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004115909-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008026532-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008248642-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290511-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003109145-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6875706-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007004196-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2008138881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2710627-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006105537-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2710627-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010330794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7294577-B2
priorityDate 1999-03-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4242698-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10340908-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09275148-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6149828-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10183185-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H09266178-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000036479-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H1197400-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6156629-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0888198-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H08162425-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6017809-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H088231-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0529292-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5855811-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0974080-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11243085-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0922947-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5946595-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5930613-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5677237-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16735610
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127644009

Total number of triples: 76.