| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ec6a0903895f8be4c7e69b093bdd28fc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-346
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D3-28 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-24 |
| filingDate |
2002-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bfe1a0bf2bfdddef8724c0a3861441a4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89bde0f122ab7cf951fdcd8b0d92288e |
| publicationDate |
2003-06-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6575823-B1 |
| titleOfInvention |
Polishing pad and method for in situ delivery of chemical mechanical polishing slurry modifiers and applications thereof |
| abstract |
The present invention is directed, in general, to polishing pads for chemical mechanical polishing of semiconductor wafers and integrated circuits. More specifically, the invention is directed to polishing pads containing a precursor slurry modifier. In the presence of a polishing slurry during chemical mechanical polishing, the precursor is released to the polishing slurry to form a slurry modifier thereby improving polishing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8962097-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005159088-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010027937-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009069790-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617272-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011143974-A1 |
| priorityDate |
2001-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |