| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3a00902baf7157c2c4f7a90ec48b907 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-622
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B35-64 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C04B35-622 |
| filingDate |
2000-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2003-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3d0419fafda6ce8ef459f4dd2f70f286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d4350a8d3731d05102063e481a3fc5a7 |
| publicationDate |
2003-06-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6573020-B1 |
| titleOfInvention |
Method for producing small and micro-sized ceramic parts |
| abstract |
In a method for the manufacture, by means of lithography, of ceramic small and micro-parts, a pre-ceramic silicon containing polymer layer is deposited on a highly temperature resistant substrate and then dried at room temperature. The layer is then exposed in an image pattern to electromagnetic radiation and the exposed layer is developed in an organic solvent to remove the non-exposed areas. The preparation is then pyrolyzed at more than 900° C. and finally sintered at a temperature of at least 1600° C. to form a ceramic structured layer on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004195733-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2444450-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10851211-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10961354-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010263663-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011091722-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009255462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4026817-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11078125-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018102234-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7452570-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10196464-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017124065-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10822460-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7323133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018160241-A2 |
| priorityDate |
1998-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |