| abstract |
In a method for producing silicon-containing ceramic structures, structures of a ceramic precursor polymer are provided on the surface of a substrate, the ceramic precursor polymer being selected from the group including polysiloxanes, polycarbosilanes, polysilazanes and/or polyureasilazanes, and the ceramic precursor structures being ceramicized on the substrate. In the method, the structures of the ceramic precursor polymer have a height of ≦20 μm and a width perpendicular to their longitudinal axis of ≦500 μm. |