http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6544583-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e23ebf1a519b4c5bd90d3b6f5d011560 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01C17-075 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01C17-075 |
| filingDate | 2000-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2003-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf3b5703aec01fe5859d66536854d35f |
| publicationDate | 2003-04-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-6544583-B2 |
| titleOfInvention | Method for adjusting resistivity of a film heater |
| abstract | A method for adjusting resistivity of a film heater on a substrate for use in process fluids employed in the semiconductor-processing industry as part of a clean, particle-free, nonreactive, non-trapping, ultra-pure, thermally tolerant, sealed system. In one arrangement, the method includes the steps of selecting a heating rate, selecting an electrical resistance value in accordance with the heating rate, selecting a resistive material for coating a substrate to produce resistance heating consistent with the electrical resistance value, selecting dimensions for a film of the resistive material selected to balance effects of conductivity, resistivity, length, and area against effects of the heating rate, and forming the film by conformally coating a surface of the substrate with the film at the selected dimensions. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6663914-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7081602-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6674053-B2 |
| priorityDate | 2000-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.