| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_526cb931f1382d6e016ee651d55e1365 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F222-06 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F222-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F232-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F277-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-029
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
1998-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf90fc148d51b000194789d366cd969d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee40ce68d3315e15ea938c010246647b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5b8de372eb968768b9fca1f105238a97
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60f3e37e1e64aefd4e02721005c010c6 |
| publicationDate |
2002-04-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6369181-B1 |
| titleOfInvention |
Copolymer resin, preparation thereof, and photoresist using the same |
| abstract |
The present invention relates to a copolymer resin for a photoresist used with far ultraviolet rays such as KrF or ArF. The copolymer is represented by the following formula III: |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007066775-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010177488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6989224-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010136477-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7863394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6451501-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6946523-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6586619-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003232273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004002017-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017137376-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2004076495-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100718315-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7674847-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7888415-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9994516-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6762268-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6987155-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004229157-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003191259-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2010064135-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004082724-A1 |
| priorityDate |
1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |