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publicationNumber US-6326315-B1
titleOfInvention Low temperature rapid ramping anneal method for fabricating layered superlattice materials and making electronic devices including same
abstract A liquid precursor for forming a layered superlattice material is applied to an integrated circuit substrate. The precursor coating is annealed in oxygen using a rapid ramping anneal ("RRA") technique with a ramping rate of 50° C./second at a hold temperature of 650° C. for a holding time of 30 minutes.
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