patent/US-6323463-B1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6323463-B1

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-566 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4408
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324
filingDate	2000-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3bded79c98c2f133f4d51939b40a9538 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3643c329432de8535ec62bad0ad1d8b8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f6569a18bcffcadf3539b4bb0a783f8
publicationDate	2001-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-6323463-B1
titleOfInvention	Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system
abstract	A method and apparatus for heating a loadlock to inhibit the formation of contaminants within the loadlock. At least one heater is attached to the walls of the loadlock to boil contaminants from the surfaces within the loadlock. These desorbed contaminants are exhausted from the loadlock by a vacuum pump. Alternatively, a purge gas can be supplied to the loadlock while the loadlock is being heated. The flow of purge gas flushes the desorbed contaminants from the loadlock.
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priorityDate	2000-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H11251397-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5378283-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419556970 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID947

Total number of triples: 64.