| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a6c760472ee4c29e9cd26152ace2eb0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-933 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02293
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-22 |
| filingDate |
1999-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c173beab7da4ee3a76d53501fd4466b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_29f0505f1cd4a9d63e5356bc9490d468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa9e06d3fd3d084867f579d850553b3c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_999c7b768b0de454f7826b7095ccdb85 |
| publicationDate |
2001-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6190925-B1 |
| titleOfInvention |
Epitaxially grown lead germanate film and deposition method |
| abstract |
The present invention provides a substantially single crystal PGO film with optimal the ferroelectric properties. The PGO film and adjacent electrodes are epitaxially grown to minimize mismatch between the structures. MOCVD deposition methods and RTP annealing procedures permit a PGO film to be epitaxially grown in commercial fabrication processes. These epitaxial ferroelectric have application in FeRAM memory devices. The present invention deposition method epitaxially grows ferroelectric Pb5Ge3O11 thin films along with c-axis orientation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004021397-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003207473-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006035390-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6794198-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005069643-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-1331232-C
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7022991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6503314-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7008801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003176012-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6998661-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005019960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6340600-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7226666-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6441417-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100459018-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002190209-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7153708-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7157111-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6503763-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001024855-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6825519-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6475813-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6465261-B2 |
| priorityDate |
1999-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |