| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fcc0b66123940d1b32783569ebfa2d45 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32 |
| filingDate |
1999-04-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e5868d73976aec19728ac52c4e353aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f7f7afcdc3498767f550d6890644fa1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef4bb5e9cbc2c59804090d59ff374581
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18b2a50ff241b597584156c9fe5d6f21 |
| publicationDate |
2001-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6180322-B1 |
| titleOfInvention |
Alkaline developing solution for radiation sensitive composition and development method |
| abstract |
An alkaline developing solution for a radiation sensitive composition, which has no undissolved products even when the concentration of a pigment contained in a radiation sensitive composition is high, which does not cause such problems as scum, the residue after development and re-adhesion, and which can form pixels having a sharp pattern edge.The alkaline developing solution for a radiation sensitive composition is an aqueous solution which contains (A-1) at least one inorganic alkaline compound and (A-2) at least one organic alkaline compound selected from the group consisting of alkanolamines and alkylamines or which contains the above component (A-1), the above component (A-2) and (B) at least one nonionic surfactant selected from the group consisting of etherified polyoxyethylenes and etherified polyoxyethylene-polyoxypropylene block copolymers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008176169-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1172699-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006084013-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003082478-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0233491-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6686126-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8338500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6649324-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005032141-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-0233491-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004096777-A1 |
| priorityDate |
1998-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |