| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-09701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02362
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
1997-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7d91a470dfcb57a15c79fcee4974ddf |
| publicationDate |
2000-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6166439-A |
| titleOfInvention |
Low dielectric constant material and method of application to isolate conductive lines |
| abstract |
A semiconductor device which includes a substrate and a conductive pattern formed on the substrate. The conductive pattern includes at least two conductive lines adjacent one another. A low dielectric constant (LDC) material is dispersed between the at least two conductive lines. The LDC material includes a polymeric material including a polymer having a first and second end. The first end includes a functional group adapted to substantially bond to an insulating layer covering at least a portion of the substrate. The second end includes a functional group adapted to substantially bond to a dielectric material deposited over the LDC material. The polymeric material also includes air pockets therein which facilitate mitigation of capacitive crosstalk between the at least two conductive lines. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6977226-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1296365-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7005390-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7220686-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002163062-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7202568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6778572-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002001943-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6716771-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6952051-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6974762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2002050629-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005136643-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005181595-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6365228-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004121589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023170751-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004072436-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6828581-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7071557-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007063640-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004188675-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797633-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1460685-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6893961-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005017280-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6396122-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6806182-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6955979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6566757-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003190816-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6841463-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004023515-A1 |
| priorityDate |
1997-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |