| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2648e65ad8850515bd727a122f1186 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04 |
| filingDate |
1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10bb0a47959cc96c927590dec5170588 |
| publicationDate |
2000-05-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6060034-A |
| titleOfInvention |
Abatement system for ClF3 containing exhaust gases |
| abstract |
A process for the abatement of a ClF x containing gas such as exhaust gases from a reactor wherein at least one step of the manufacture of integrated circuit is carried out, wherein the ClF x containing gas is passed through a bed of adsorbent comprising sodalime having a moisture content of less than 3% by weight, to substantially remove all of the ClF x compound from the ClF x containing gas with substantially no generation of byproducts. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6576481-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006032373-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6375911-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7629590-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009081874-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008073559-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7326279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7875125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008047607-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008121811-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007210260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6773925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7820981-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7723700-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007241689-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008223409-A1 |
| priorityDate |
1998-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |