| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B6-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00 |
| filingDate |
1996-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7da5c8d16df7b05c6df30303cd307308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15fc06acdf7c7f43fa3ec74660abf254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4af941068c68aba9389a3d68721cbc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2707bd50d05942a885dd9a33b50e23b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc053cd5edbca86d7f1c088c12d83f2 |
| publicationDate |
2000-02-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-6029679-A |
| titleOfInvention |
Semiconductor cleaning and production methods using a film repulsing fine particle contaminants |
| abstract |
By employing a cleaning method wherein a substrate such as Si wafer is covered with a film having electrostatic repulsive force or a substance capable of controlling a zeta potential so as to prevent or remarkably reduce adhesion of fine particles present in a cleaning solution or etching solution, electronic parts can be produced in higher yield and lower cost. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004202967-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006264011-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10356177-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10356177-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7569493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010170531-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6797647-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11139159-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009196791-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113013019-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8226772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004209481-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011018105-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7049235-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8940102-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011214688-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10137481-B2 |
| priorityDate |
1995-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |