| abstract |
A corrosion resistant apparatus for processing a substrate in corrosive process gas comprises (i) a process chamber, (ii) a process gas inlet provided for introducing process gas into the chamber, (iii) a process gas exhaust for exhausting process gas from the chamber, and (iv) processing components for processing the substrate in the chamber. At least a portion of any one of the (i) process chamber, (ii) process gas inlet, (iii) process gas exhaust, or (iv) processing components, is exposed to the corrosive gas in the chamber, and is made of an alloy comprising nickel and eutectic component, the alloy being substantially resistant to corrosion by the corrosive process gas. |