| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4581 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458 |
| filingDate |
2001-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c4f51ab5312a3b628065baa5ccc5a34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_511997785a4668446381b72e63c27ea2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6c6dad123aba30d3089cece6ba62ba0d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_620122497948d2d5067e767333092382 |
| publicationDate |
2003-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2003031792-A1 |
| titleOfInvention |
Reduction of electrostatic charge on a substrate during PECVD process |
| abstract |
Provided herein is a method of reducing an electrostatic charge on a substrate during a plasma enhanced chemical vapor deposition process, comprising the step of depositing a conductive layer onto a top surface of a susceptor support plate disposed within a deposition chamber wherein the conductive layer dissipates the electrostatic charge on the bottom surface of the substrate during a plasma enhanced chemical vapor deposition process. Also provided are a method of depositing a thin film during a plasma enhanced chemical vapor deposition process using the methods disclosed herein and a conductive susceptor. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9455152-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016122506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008194169-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016322215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7959735-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9859088-B2 |
| priorityDate |
2001-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |