patent/US-5937304-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5937304-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5520dd38cc403678d9f91e0b0ee95fb
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02F1-136
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-1368 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02F1-136
filingDate	1996-06-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1999-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de0909a2393a2f31b46ed1d588bedb8c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafb89c5fdeb2561b9c7ef52cfae1ef2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28d93c4ad3b4258ec00b73c1d288a52e
publicationDate	1999-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5937304-A
titleOfInvention	Method for fabricating semiconductor device and method for producing liquid crystal display apparatus
abstract	A method for fabricating a semiconductor device includes the steps of forming a semiconductor film containing silicon, implanting impurity elements to the semiconductor film, performing a dehydrogenation treatment to the semiconductor film, and activating the impurity elements in the dehydrogenated semiconductor film.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9691982-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107039256-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9704712-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003094585-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8183135-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7129522-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104813445-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007252206-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8008693-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004178429-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10020187-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004124419-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6861328-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10535513-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007051957-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016013222-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7635866-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2001010391-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6821343-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104813445-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010015788-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6780687-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6499425-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014147990-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6457587-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737672-B2
priorityDate	1995-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0383230-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H0324717-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S60105216-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H02295111-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H01187814-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425193155 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID783 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419544408

Total number of triples: 54.