| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8608ba743b941f02f155b75284bde817
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fd605903581ac32f4d750155c2b6d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89af0bde61ee35284d4fafcb598f1f67 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-268 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate |
2008-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4cd93e3eb43e50163a036a145c1a4b0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e96da98f1984758648d3f13358c5882
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_696ffc31b4c1ab16bd571d9a6d898672 |
| publicationDate |
2010-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2010015788-A1 |
| titleOfInvention |
Method for manufacturing semiconductor device |
| abstract |
Plasma doping is performed by exposing a support substrate 11 made of a semiconductor to a plasma generated from a mixed gas of boron 51 which is an impurity and hydrogen 52 and helium 53 which are diluents so as to implant the boron 51 into the support substrate 11 . Then, a preliminary heating step is performed by heating the support substrate 11 so that doses of the hydrogen 52 and the helium 53 are smaller than that of the boron 51 in the support substrate 11 by utilizing a difference between a thermal diffusion coefficient of the boron 51 in the support substrate 11 and those of the hydrogen 52 and the helium 53 . Then, a laser heating step is performed for electrically activating the boron 51 implanted into the support substrate 11 using a laser. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021175123-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-102339737-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012015507-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2515631-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/GB-2515631-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108431925-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I511185-B |
| priorityDate |
2007-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |