| abstract |
A coating film, which is constituted of a polysilazane, is formed on a substrate. The polysilazane in the coating film is then oxidized by being brought into contact with active oxygen or ozone, or by being exposed to light. A protective film, which is constituted of silica, is thereby formed on the substrate. An inorganic protective film is also provided, which comprises an inorganic oxide film, that is obtained by subjecting a polysilazane coating film to oxidation treatment, and fine particles contained in the inorganic oxide film. |