http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004131796-A1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-318 |
| filingDate | 2003-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eeb08af80245863b04b55cd8ffd5e33d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9ff42fc9fb5e53ef71c091cb57b3d323 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5382a61dffcdf19d50d88f28deb69949 |
| publicationDate | 2004-07-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2004131796-A1 |
| titleOfInvention | Method of fabricating a protective film by use of vacuum ultraviolet rays |
| abstract | In a method of fabricating a protective film, a vacuum ultraviolet radiation CVD (Chemical Vapor Deposition) system is provided. The system includes a vacuum ultraviolet rays generator, a reactor provided with a platform for supporting a substrate, a heat retainer provided on the platform, and a window separating the vacuum ultraviolet rays generator from the reactor. Then, an organic stock gas is fed from a gas feeder into the reactor while retaining temperature of the substrate at a low temperature with the heat retainer. Simultaneously, the reactor is irradiated with vacuum ultraviolet rays from the vacuum ultraviolet rays generator through the window. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9255329-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8747964-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010022072-A1 |
| priorityDate | 2002-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.