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publicationDate 1999-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5861671-A
titleOfInvention Process for removing seams in tungsten plugs
abstract A method for fabricating seamless, tungsten filled, small diameter contact holes, has been developed. The process features initially creating a tungsten plug, in the small diameter contact hole, and filling or repairing, seams or voids in the tungsten plug, with an additional layer of selectively deposited tungsten.
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