| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5198a2a21392d6cbc0bb4898b3fb3d29 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S117-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66863
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02433
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0243
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02661 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q90-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q60-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-338
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10 |
| filingDate |
1996-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c888e3bbe39d77bc00f7c3003b58d6b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d95e5e9114771a4b5317a9802c701755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74792fb6a45716b04a063dfb485ee1e8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b584e59e94e730b90ff4c7fdb718679a |
| publicationDate |
1998-11-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5833749-A |
| titleOfInvention |
Compound semiconductor substrate and process of producing same |
| abstract |
A compound semiconductor substrate having at least one compound semiconductor layer epitaxially grown on a silicon single crystal substrate, wherein the silicon single crystal substrate has a surface on which the compound semiconductor layer is epitaxially grown, the surface being inclined at an off angle of not more than 1 deg to a (100) plane of silicon crystal; and the compound semiconductor layer has a free or top surface having a roughness of 3 nm or less in terms of a mean square roughness, Rms, determined by an atomic force microscopic measurement in a view field area of 10 mu mx10 mu m or a roughness of 10.5 nm or less in terms of a maximum height difference, Ry. The compound semiconductor substrate is produced by a process comprising the steps of: preparing a silicon single crystal substrate having a surface inclined at an off angle of not more than 1 deg to a (100) plane of silicon crystal; forming a buffer layer of a first compound semiconductor layer having a thickness of 5 nm to 15 nm on the surface of the silicon single crystal substrate; and epitaxially growing a second compound semiconductor layer on the buffer layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6657194-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005285159-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7135420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003056715-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7208043-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I677964-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6204189-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108140668-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108140668-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004191973-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7838392-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7187059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6372981-B1 |
| priorityDate |
1995-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |