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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-402
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
filingDate 1995-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 1998-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf89b457b9655f1a2acb9d4f71d405aa
publicationDate 1998-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5753564-A
titleOfInvention Method for forming a thin film of a silicon oxide on a silicon substrate, by BCR plasma
abstract A method for forming a thin film of a silicon oxide on a silicon substrate is disclosed. An Si oxide film is formed by an ECR plasma. CVD with the use of a silicon compound gas containing fluorine, whereby the generation of particles can be suppressed to improve the quality of the device and the yield, the planarity of the Si oxide film functioning as an interlayer dielectric film or a passivation film can be improved, and the higher speed operation in a semiconductor device can be accomplished.
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