patent/US-5688382-A

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5688382-A

Outgoing Links

Predicate	Object
assignee	http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d511619cb9e1ab5d40d342a2f575490
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-357 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-46 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-35 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06
filingDate	1995-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	1997-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4c491065107cec41c3483ac18841bd4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb488748b7e11ba262c317b51affc2db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4077c707e7b50ac4ec802b27e9e4a09a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecfc9291619ee478f6fc7f2d44520848 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc0cb82ac11b2eab701672dc7d61b7c0
publicationDate	1997-11-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-5688382-A
titleOfInvention	Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate
abstract	A microwave plasma deposition source including a vacuum chamber for containing a substance to be energized in a plasma with microwave energy, a coaxial microwave feed ending in the chamber, a sputter target in the chamber and electrically isolated from the coaxial feed, and a second substrate spaced from the sputter target for defining a plasma volume between the substrates.
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006223322-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007209930-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837838-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10167556-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043372-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7846853-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010155223-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7781063-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010108278-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6444105-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8313832-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7776392-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005277721-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005245644-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9018108-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011097517-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011305912-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8277613-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664214-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006196766-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11664226-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7935578-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6471831-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010112303-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6737366-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011076420-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011076422-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006202204-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9695503-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009238959-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6179973-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11784042-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6602800-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010239851-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8057649-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7851059-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016053366-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8679594-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7645710-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006231201-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008050580-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7678710-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357433-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8685534-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7955661-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6899054-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8383007-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6022800-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11270905-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009208715-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8440301-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005274774-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6497796-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8039530-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007141324-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7993733-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6132575-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7772121-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009238993-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871064-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009277778-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8349156-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009137513-A2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2009137513-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009283400-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837817-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19916941-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078315-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010078320-A1
priorityDate	1994-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate	Subject
isCitedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5322605-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4925542-A
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6230 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129479675

Total number of triples: 101.