| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0f26a9c2efad3ae086a108f3c04b57d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-014 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32133 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 |
| filingDate |
1996-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_858fcc61ccdac735f1bd0b49a617fe79 |
| publicationDate |
1997-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5656533-A |
| titleOfInvention |
Method of preventing polysilicon stringers during formation of a stacked double polysilicon structure by using dielectric sidewall spacers |
| abstract |
A process for producing dual layer polysilicon structures without the formation of residual polysilicon stringers and the resulting structure. Dielectric sidewalls are formed upon a first polysilicon structure to prevent the formation of overhang regions during subsequent oxidation that will harbor residual polysilicon stringers formed by the deposition of a second polysilicon structure on top of the first polysilicon structure. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6040223-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004048483-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6197698-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7153781-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108598260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6015732-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6046085-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6409879-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108598260-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7105442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015303260-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6159806-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10957764-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6890860-B1 |
| priorityDate |
1996-01-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |