| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e415f6f1eeb8706d299ea086326248bf |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-033
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
1996-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1997-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c4ad9499fb9590800b0c39ddacca12db
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_63a35f530535c5d406c2bb34e6780960
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6342379f267837e4951da7476d052b4 |
| publicationDate |
1997-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5641604-A |
| titleOfInvention |
Photoresist composition with improved differential solubility through hydroxyl group blocking via reaction with vinyl ethers |
| abstract |
A photoresist composition comprising an alkali soluble resin and an ortho-naphthoquinone diazide sulfonic acid ester of a polyhydroxy alcohol. The photoresist is characterized by having at least a portion of its free hydroxyl groups on the photoactive compound blocked with an acid labile blocking group that generates a hydroxide upon cleavage. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006099531-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7662538-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-101762976-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5858605-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8361691-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009081589-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8715918-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009280433-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11385543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5917024-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771923-B2 |
| priorityDate |
1995-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |