| abstract |
A positive-working radiation-sensitive mixture is disclosed which contains as essential constituents: a) an alpha -carbonyl- alpha -sulfonyl-diazomethane, which forms a strong acid on irradiation, of the general formula I <IMAGE> (I) in which R1 and R2, independently of one another, denote an alkyl-, cycloalkyl-, aryl- or heteroaryl radical b) a compound having at least one C-O-C or C-O-Si bond which can be cleaved by acid, and c) a water-insoluble binder which is soluble or at least swellable in aqueous-alkaline solutions. The radiation-sensitive mixture according to the invention is notable for a high sensitivity over a wide spectral range. It also exhibits a high thermal stability and does not form any corrosive photoylsis products on exposure to light. |