| abstract |
A vertical cavity surface emitting laser (VCSEL) having sensing capabilities is fabricated by forming a layer having the capability to change the threshold current of the VCSEL. This can be accomplished by forming a deformable membrane or a cantilevered beam on the VCSEL. The deformation of movement of the beam causes a change in the threshold current of the VCSEL, so that it can go from lasing to nonlasing or vice versa. In addition, a layer which changes reflectivity in the presence of a particular chemical can also be formed on the VCSEL to produce the same result. |