| abstract |
Disclosed is a microprobe-provided circuit substrate for use as a probe assembly or the like, and a method for producing the same. The microprobes in the circuit substrate are constituted by pillar-shaped conductors provided in respective fine through holes formed in a base and having one ends projected out of the respective fine through holes. The circuit substrate having microprobes of such a structure as described above can be produced by the method for producing a microprobe-provided circuit substrate in which pillar-shaped conductors as precursors of microprobes are provided by an electroless plating method or the like in fine through holes formed in a base by a photographic method or the like, and then the microprobes are formed by projecting one ends of the respective pillar-shaped conductors out of a surface of the base by etching treatment or the like. Thus, it is possible to eliminate difficulties in fining microprobes, in positioning the respective microprobes accurately, in diversifying the arrangement of the microprobes, and the like, which are caused by the conventional process of producing a circuit substrate by manually fixing electrically conductive metals as precursors of microprobes at predetermined positions on a base. |