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filingDate 1990-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2a48b9bb2d6c38698e04009e63996121
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publicationDate 1993-04-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-5206317-A
titleOfInvention Resist material and process for use
abstract Excellent resolution and sensitivity in the patterning of resists utilized in device and mask manufacture is obtained with a specific composition. In particular this composition involves polymers having recurring pendant acid labile α-alkoxyalkyl carboxylic acid ester moieties in the presence of an acid generator activated by actinic radiation such as UV-visible, deep ultraviolet, e-beam and x-ray radiation.
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