| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0353
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2201-0317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K2203-0195 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4846 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48 |
| filingDate |
1992-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1992-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ed1b885b960a32b84de61fac9188ec9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a833b604ed1ce4d9e47a95ac83cbedb |
| publicationDate |
1992-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-5173392-A |
| titleOfInvention |
Forming a pattern on a substrate |
| abstract |
A pattern is formed on a substrate by providing on the substrate a dielectric composition; defining a pattern in said dielectric; depositing metal and then micromachining the metal to provide the desired pattern on the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6964882-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7824824-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015124462-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6940636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003038372-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10049831-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011210096-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6933163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8257600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003075794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6673256-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6150074-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010170870-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5956060-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006204860-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8728336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003053233-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020089114-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7160770-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5945254-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11609496-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004061192-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6110649-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063239-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004063237-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018040644-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11056514-B2 |
| priorityDate |
1989-08-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |