| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ab7238e5c635fc6c8422db0319e12360 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-117 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76202 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-762 |
| filingDate |
1987-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1990-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2fa81ced3873a3882c40099899aefaf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eb9057522573d1e73c32ddb6a3e54819
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_585fbc785c97ae269fe8e1eeaba2db4f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2f0dc885f90c728edbec40fe0a179ab |
| publicationDate |
1990-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4897365-A |
| titleOfInvention |
Reduced-beak planox process for the formation of integrated electronic components |
| abstract |
A method for reducing birdbeaks formed during a planox process is disclosed. On a silicon substrate (1), oxide (2) and nitride (3) are formed. The oxide and nitride are then selectively etched using a single plasma having high selectivity with respect to silicon and a photoresist mask (4). The high selectivity toward silicon is achieved by use of a CHF 3 +CO 2 plasma under conditions of 30:1 oxide/silicon selectivity. Field oxide regions (5) with reduced birdbeaks can then be formed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6531364-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5248625-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6525384-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5983828-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5252503-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6395641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5962914-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2005287916-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6593245-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0851472-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6033943-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5413966-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6794301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5861339-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5298110-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5441094-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5312770-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0851472-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9616437-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6661061-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5225358-A |
| priorityDate |
1984-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |