| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02277
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3121
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
1983-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1984-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1a1f18a70f5c9589c6c2b15b0619387 |
| publicationDate |
1984-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4460436-A |
| titleOfInvention |
Deposition of polymer films by means of ion beams |
| abstract |
A patterned polymer film is deposited on a substrate by pattern-wise exposing a monomer vapor to a beam of ions and dry developing by etching with oxygen plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4968582-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4601913-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5506008-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4874632-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-9315443-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5064681-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0192078-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AU-624467-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5071671-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5114827-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0192078-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4930439-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4698236-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5273849-A |
| priorityDate |
1983-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |