| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80787665b837ed3eb503bbcd27c0043a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F16-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F20-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F2-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08F16-36 |
| filingDate |
1982-03-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1983-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08e58e24c0898ddc0eca562f70c5bcb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b0d783d9c178a0d4bf01e0a38c6b510f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a3e358d9fe4cf6aa9965332c46884ed0 |
| publicationDate |
1983-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4419506-A |
| titleOfInvention |
Radiation sensitive polymer materials |
| abstract |
A radiation sensitive polymer material having (a) one or more repeating units of the formula: <IMAGE> wherein R is an alkyl group, a halogen atom, a hydrogen atom or a dimethylamino group, and (b) an addition polymerizable repeating unit derived from a compound having a CH2=C< group in the molecule, can give a positive type resist having excellent resistance to dry etching and being highly sensitive to radiation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015079522-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9268245-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4877767-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013109826-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9291904-B2 |
| priorityDate |
1981-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |