| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2051317369a779747701bc0ebe411a4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S522-904 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
1976-02-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1977-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_585bcd6848df41125c6106b2b41522b9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_675ae04cd9c502f82cacd7b9ab7ab240
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8984ff15feed99e00dd01b0e5f8f19b5 |
| publicationDate |
1977-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-4054454-A |
| titleOfInvention |
Photosensitive copolymer on silicon support |
| abstract |
Copolymers of certain keto-olefins and SO 2 are sensitive to light and form films useful as photoresists in the manufacture of printed circuits, integrated circuits, printing plates and the like. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5004660-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4262073-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-4419506-A |
| priorityDate |
1975-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |