abstract |
High purity, fine Si 3 N 4 powder produced by the vapor phase reaction of SiCl 4 with NH 3 is amorphous. The crystallization rate of the amorphous powder is enhanced by heating the powder while in intimate contact with a titanium containing material, for example, TiN codeposited with the Si 3 N 4 by the simultaneous reaction of TiCl 4 with NH 3 . |