Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b5b43f4a86fc8f7ad28689d833acac53 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3083 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-053 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-10823 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-488 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-10876 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-09 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
filingDate |
2021-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b51eaeb8192b9d2094663278f461a02 |
publicationDate |
2022-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2022157826-A1 |
titleOfInvention |
Semiconductor structure manufacturing method and semiconductor structure |
abstract |
Provided are a semiconductor structure manufacturing method and a semiconductor structure. The semiconductor structure manufacturing method includes: a substrate is provided, which includes a first area and a second area set adjacent to each other; multiple trenches, which are arranged at intervals along a first direction, are formed in both the first area and the second area of the substrate; a word line (WL) is formed in each of the multiple trenches, a feature size of the WL in the first area is different from that of the WL in the second area; and a contact structure is formed on the WL with the greater feature size. |
priorityDate |
2020-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |