http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021193459-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_154f5a8a983d88f296117dcc92946ab4
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-10805
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2211-181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K2211-1007
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02271
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K19-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02183
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02189
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K11-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F17-00
filingDate 2020-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_161f2ebd2eb1589df8dd70bb5c255c64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca8767c324a688d6b98f6fb7f0dc5a36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_773e1d11d7e0bf1d8c676a3bb5ae3361
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d2b46eec138a192ef80dc2b3fbe8a323
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06ce2a83a6b5c8b51860a1d13158ead1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c772a92bcf1da44cbb7b86e0e2163e4
publicationDate 2021-06-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2021193459-A1
titleOfInvention Organic metal compound, composition for depositing thin film comprising the organic metal compound, manufacturing method for thin film using the composition, thin film manufactured from the composition, and semiconductor device including the thin film
abstract An organometallic compound represented by Chemical Formula 1 may be used in a composition for depositing a thin film including the organometallic compound, where A is derived from a compound represented by Chemical Formula 2:Embodiments of the present disclosure include the thin film, a manufacturing method for the thin film using the composition for depositing the thin film, and a semiconductor device including the thin film.
priorityDate 2019-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011020547-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H07252168-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008242111-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454454409
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456968771
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451790505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162289236
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454160805
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455228724
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160233812
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID455228725
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159831535
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID442764426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451221979
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID85755870
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161200810
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450669024
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453179821
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID466351099
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID156521770
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID162169946
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454594492
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11116885
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12057519
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159436295
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451561353

Total number of triples: 70.