| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c1440b95ffa99739ca205b9cef668bc1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e18e3e4ed0845f24f8ae6773bcd0a423
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_006c4519aac3236d65c88559582af776 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-55 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45525
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-02 |
| filingDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78adf89d6e933e1064d04c61170eaeb6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a5d65a2c45d06f00e1b83c453c908e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ec3707381efb6e6c34dee58f3327036 |
| publicationDate |
2011-01-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2011020547-A1 |
| titleOfInvention |
High dielectric constant films deposited at high temperature by atomic layer deposition |
| abstract |
Methods and compositions for depositing a film on one or more substrates include providing a reactor with at least one substrate disposed in the reactor. At least one alkaline earth metal precursor and at least one titanium containing precursor are provided, vaporized, and at least partly deposited onto the substrate to form a strontium and titanium or a strontium and titanium and barium containing film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022235536-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012219710-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021193459-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10131680-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8642127-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9153640-B2 |
| priorityDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |