Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-024 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02381 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16145 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02372 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-02331 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-181 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76813 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-485 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02329 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-4824 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53204 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-522 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76829 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76805 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
2020-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_210510895de61f90fcb6773a8e7f98e4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fb026d02c2fd2aec135d3d3d5f101fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51d13cf5822fef791b31cd4d4b94f32c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36eb875753b200a1d8afaaf17a28645e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_79fbe9a83842e31f83bdfdd771818481 |
publicationDate |
2021-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2021066123-A1 |
titleOfInvention |
Semiconductor device |
abstract |
Aspects of the present disclosure are related to a semiconductor device that includes a crystalline substrate having a first surface and a second surface vertically opposite each other and an insulating layer disposed on the first surface of the crystalline substrate. The device may also include an etch stop layer interposed between and contacting the crystalline substrate and the insulating layer and a conductive through via structure penetrating the crystalline substrate and the insulating layer. The device may also include an insulating separation layer disposed horizontally adjacent to the conductive through via structure, and having an inner wall and an outer wall. The insulating separation layer may include a first portion disposed between the conductive through via structure and the crystalline substrate, and a second portion disposed between the conductive through via structure and the etch stop layer. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11646263-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022328404-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021391254-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2023060982-A1 |
priorityDate |
2019-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |