| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2029-7858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42356 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-267
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823412
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823468
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0653
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0649
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8234 |
| filingDate |
2018-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b71ed8d1014ded9f660a7efc37fd1c00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dce47eb6932fa56b7d1ab8fad62751ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa57155a94ec485068066724e7721ca7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_337c73316e986c8c90bc56901d0a2631 |
| publicationDate |
2020-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2020052124-A1 |
| titleOfInvention |
Nanosheet mosfet with isolated source/drain epitaxy and close junction proximity |
| abstract |
A sacrificial inner dielectric spacer is formed on physically exposed sidewalls of each recessed semiconductor channel material nanosheet of a nanosheet material stack that further includes recessed sacrificial semiconductor material nanosheets that have an inner dielectric spacer formed on physically exposed sidewalls thereof. A local isolation region is then formed by selective epitaxial growth on a surface of a semiconductor substrate containing the nanosheet material stack. After forming the local isolation region, the sacrificial inner dielectric spacers are removed and a source/drain region is formed on the physically exposed surface of each recessed semiconductor channel material nanosheet. A portion of the source/drain structure is formed in a gap located between each neighboring pair of vertically spaced apart inner dielectric spacers. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11532702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11024650-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11362217-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11450754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022218536-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020118892-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022271171-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2023045633-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021367032-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020343273-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111653610-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022310851-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11721741-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11121044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022328646-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022165881-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11715803-B2 |
| priorityDate |
2018-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |