Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_421cadb30fc0074fe61126eb980d19d6 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24585 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-002 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-334 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3341 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32192 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32449 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32954 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32697 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32137 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32935 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67248 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32724 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32467 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67115 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 |
filingDate |
2019-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_444a2ed22d9894122b5cd1f6b6dfcc2c |
publicationDate |
2019-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019287825-A1 |
titleOfInvention |
Plasma processing method and plasma processing apparatus |
abstract |
According to one embodiment, a plasma processing apparatus includes: a vacuum container; a sample stage on which a sample is mounted in an interior of the vacuum container; an exhaust unit which exhausts the interior of the vacuum container; a gas supply unit which supplies a processing gas to the interior of the vacuum container; a high frequency power application unit which applies a high frequency power to the interior of the vacuum container; an irradiation unit which irradiates the sample mounted on the sample stage with infrared light from an outside of the vacuum container; and a control unit which controls the exhaust unit, the gas supply unit, the high frequency power application unit, the irradiation unit, and a temperature measurement unit which measures a temperature of a surface of the sample stage on which the sample is mounted. The control unit controls an intensity of the infrared light with which the irradiation unit irradiates the sample based on the temperature measured by the temperature measurement unit when the irradiation unit irradiates the sample mounted on the sample stage with the infrared light. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515167-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113287190-A |
priorityDate |
2018-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |