http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019279872-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e489719c5433b26a9352e6ea776969ab
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3151
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0812
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24479
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2204-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0041
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2652
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02252
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C23-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C15-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
filingDate 2019-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8f26590c8d81b8643f1ccba98d34f1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c718087cf9dcff1f1fa75570443c6d96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e976fcd7ff1cd3a2718165ab66bb3ffa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6ed366e7074c0e1e8c876601b6bda34
publicationDate 2019-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019279872-A1
titleOfInvention Method for neutral beam processing based on gas cluster ion beam technology and articles produced thereby
abstract A method for treating a silicon substrate, and a silicon substrate, provide a surface treated with an accelerated neutral beam.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11508929-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114286491-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022157554-A1
priorityDate 2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015075998-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5582879-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014273514-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015294838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012045615-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7794798-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013059445-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617668-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10186420-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363678-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084216-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084215-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011272593-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011084214-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013330845-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7905199-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013059446-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018247831-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010193472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8372489-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8202435-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013213933-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016071734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012238092-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016172197-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011300599-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017303383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018299771-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419548998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419593449
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82223
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449377877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456171974
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID17358
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91865837
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24556
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23969
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160820406
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5360311
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419515392
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419527022
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24601
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452630021
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID451572542
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454029609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541

Total number of triples: 105.