Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b49b135f099e96a0e4cab2427a48ae8 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32135 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F4-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-12 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F4-00 |
filingDate |
2017-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e84039e8c5095dfccfe0f8d39b72f7dd |
publicationDate |
2019-04-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2019112716-A1 |
titleOfInvention |
A method for etching a metal surface |
abstract |
A method for etching a metal surface includes a step of contacting a metal surface with a protic compound for a first time period to produce a first modified surface. The first modified surface is contacted with a protic ligand-forming compound that reacts with the first modified surface to form a volatile metal-containing compound including a metal atom and the protic ligand-forming compound. The volatile metal-containing compound is removed from the vicinity of the metal surface. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11739428-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11739427-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112218436-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11640899-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11574813-B2 |
priorityDate |
2016-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |