http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015159273-A1

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filingDate 2013-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c103df55e94f78fe901b2170d478def3
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publicationDate 2015-06-11-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2015159273-A1
titleOfInvention Precursors for Atomic Layer Deposition
abstract Atomic layer deposition (ALD) and chemical vapor deposition (CVD) precursors that are useful for forming metal-containing films are provided. These compounds include triazapentadienyl, α-imino enolate compounds and α-imino ketone compounds having formulae 1, 2, and 3, respectively. An ALD method using the precursors is also provided.
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