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filingDate 2018-09-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_32fdbef56070f2e95e6462db8cac85cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9adb0f2f26f1ea081dc13590cad05f1
publicationDate 2019-03-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019074370-A1
titleOfInvention Semiconductor device primarily made of nitride semiconductor materials and process of forming the same
abstract A semiconductor device made of primarily nitride semiconductor materials is disclosed. The semiconductor device includes a substrate; a semiconductor stack on the substrate; electrodes of a gate, a source, and a drain each provided on the semiconductor stack, where the gate electrode contains nickel (Ni); a Si compound covering surfaces of the semiconductor stack; an aluminum oxide (Al2O3) film covering the gate electrode exposed from the Si compound; and another Si compound covering the Al2O3 film and the Si compound exposed from the Al2O3 film. A feature of the semiconductor device of the invention is that the Al2O3 film exposes the Si compound at least between the gate electrode and the drain electrode.
priorityDate 2017-09-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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