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filingDate 2018-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2019-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2019006235-A1
titleOfInvention Semiconductor device having a liner layer with a configured profile and method of fabricating thereof
abstract Devices and methods that include for configuring a profile of a liner layer before filling an opening disposed over a semiconductor substrate. The liner layer has a first thickness at the bottom of the opening and a second thickness a top of the opening, the second thickness being smaller that the first thickness. In an embodiment, the filled opening provides a contact structure.
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