Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_de498babb0c04a00ceb653738877b147 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-067 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30604 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05K3-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-18 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 |
filingDate |
2016-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e71a24e5d32572231e020289afaa5227 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_06aa09484cb3ad21f9dadb918955407f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb2319e4faff68720cefda4949027d29 |
publicationDate |
2018-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2018298501-A1 |
titleOfInvention |
Etching liquid composition and etching method |
abstract |
The present invention provides an etching liquid composition consisting of an aqueous solution that contains (A) 0.1 to 30 mass % of at least one type of oxidizing agent selected from among ferric ions and cupric ions; (B) 0.1 to 20 mass % of hydrogen chloride, and an etching method using it. |
priorityDate |
2015-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |