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publicationDate 2017-06-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2017168389-A1
titleOfInvention Photoresist compositions, intermediate products, and methods of manufacturing patterned devices and semiconductor devices
abstract A photoresist composition includes a photoresist polymer including a repeating unit to which a silicon-containing leaving group is combined, a photo-fluorine generator including a sulfonium fluoride, and a solvent.
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