http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2010208023-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B41J2-055 |
| filingDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c882a8d10321681c65c22225115d85ab |
| publicationDate | 2010-09-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | JP-2010208023-A |
| titleOfInvention | Inkjet head manufacturing method and inkjet head |
| abstract | An inkjet head manufacturing method capable of controlling the positional relationship between a pressure generating element, an ink flow path, and an ejection port with high accuracy and good reproducibility. A step of laminating a first resin layer and a positive resist layer containing silicon atoms on a substrate on which the pressure generating element is formed, and reduction relative to the positive resist layer containing silicon atoms. A step of patterning a part of the ink flow path pattern by performing i-line exposure and development processing using a projection exposure apparatus, and dry etching using oxygen plasma using the positive resist layer containing the silicon atoms as a mask. A step of patterning one resin layer to form an ink flow path pattern; a step of forming a coating resin layer around the ink flow path pattern; and exposing and developing the coating resin layer to form the discharge port And a step of dissolving and removing the ink flow path pattern. [Selection] Figure 4 |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10551738-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106959586-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106959586-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10234760-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017168389-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014061062-A1 |
| priorityDate | 2009-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 48.